Micro/nano-systems, RF and optical MEMS, sensors.


MEMS technologies and processes, micro-actuators, RF devices, engineered surfaces, optics and adaptive optics, microfluidic cooling, micro-needles and biomedical micro-devices, sensor technologies for electric and magnetic field sensors, gas and environmental sensors, and smart agricultural sensors.

Graduate Student Opportunities

Dr. Shafai is currently seeking graduate students. Please contact him for more information.

Selected Publications

T. Chen and C. Shafai, “Comparison of a MEMS dc electric field sensor based on silicon and polyimide substrates,” MNE Eurosensors 2022 Conference, Leuven, Belgium, 2 pages, 19-23 September 2022.

Mehdi Allameh and Cyrus Shafai, “Tri-electrode MEMS electrostatic actuator with lower control voltage and higher stroke for actuator array implementations,” Journal of Electrostatics, vol. 114, 12 pages, November 2021.

Elnaz Afsharipour, Tao Chen, Yu Zhou, Gayan Wijeweera, Lot Shafai, and Cyrus Shafai, “Study of the shielding effect of a vertical moving shutter micromachined field mill for measuring dc electric field,” Measurement Science and Technology, vol. 31, 105105, 11 pages, July 2020.

Ramin Soltanzadeh, Elnaz Afsharipour, Neda Anssari, Behzad Mansouri, and Cyrus Shafai, “Structural and Performance Comparison between SU-8 Microfabricated and 3D-Printed Microneedle Electrodes,” Journal of 3D Printing in Medicine, vol. 4, 16 pages, June 2020.

Ramin Soltanzadeh, Elnaz Afsharipour, and Cyrus Shafai, “Investigation of Transcutaneous Electrical Nerve Stimulation Improvements with Microneedle Array Electrodes based on Multiphysics Simulation,” International Journal for Numerical Methods in Biomedical Engineering, vol. 36, 17 pages, March 2020.

Yu Zhou, Cyrus Shafai, and James Dietrich, “A Spiral Spring Electrostatic Actuator for Double Layer Deformable Mirror with Continuous Phase Sheet,” accepted for publication SPIE Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3), vol. 18, 015001, 15 pages, April 2019.

Elnaz Afsharipour, Ramin Soltanzadeh, Byoungyoul Park, Dwayne Chrusch, and Cyrus Shafai, “Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications”, Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3), vol. 18, 015001, January 2019.

Byoungyoul Park, Elnaz Afsharipour, Dwayne Chrusch, Cyrus Shafai, David Andersen, and Greg Burley, “A Low Voltage and Large Stroke Lorentz Force Continuous Deformable Polymer Mirror for Wavefront Control,” Sensors and Actuators A, vol. 280, pp. 197-204, 1 September 2018.

Byoungyoul Park, Elnaz Afsharipour, Dwayne Chrusch, Cyrus Shafai, David Andersen, and Greg Burley, “Large Displacement Bi-Directional Out-of-Plane Lorentz Actuator Array for Surface Manipulation,” Journal of Micromechanics and Microengineering, vol. 27, 9 pages, August 2017.

Elnaz Afsharipour, Byoungyoul Park, and Cyrus Shafai, “Determination of Reactive RF-Sputtering Parameters for Fabrication of SiOx Films with Specified Refractive Index, for Highly Reflective SiOx Distributed Bragg Reflector,” IEEE Photonics Journal, vol. 9, 16 pages, February 2017.