Scanning Auger Microprobe
Facility: Manitoba Regional Materials and Surface Characterization Facility
Location: Mechanical & Manufacturing Engineering EITC E1-222
Access: Fee for service & trained students/researchers & collaborative projects
Contact: Abdul Khan 204-474-6977 or 204-474-6909
JEOL JAMP 9500F is a Field Emission Auger microprobe for surface analysis. It can be used to analyse the surface contaminants, corrosion failures and oxide and other layers on the surface. It uses a hemispherical electrostatic energy analyser (HSA) with a multi channel detector for Auger analysis. JAMP 9500F allows high resolution surface image observation in SEI and BSE imaging modes. Auger spectrum, Auger line profile and Auger image analysis can be performed on metallic and non metallic samples. This instrument can perform depth profile analysis for layered materials such as semiconductors and coatings using ion etching. Auger analysis on non- conducting materials is also possible due to low energy charge neutralization ion gun. Auger microprobe is also equipped with Oxford EDS detector for EDS analysis.
Auger line scan over a sputtered silicon oxide surface
Auger map of boride particle in Ni base super alloy